Inertial Sensors
In contrast to motion sensors, which detect the movement of objects, inertial sensors are sensors that provide measurement data on their own state of movement, for example acceleration and rotation rate. If these two variables are measured in all three axes, they are referred to as 6-in-1 sensors. In these MEMS sensors, a seismic mass is deflected by the accelerated movement or the acceleration due to gravity, thereby changing the capacitance of a plate capacitor, from which the acceleration is calculated. Applications are mainly found in the automotive sector, e.g. in vehicles, safety-relevant modules (airbags, ESP, ABS) are supplied with acceleration data or they support satellite navigation. However, such sensors are also used in aircraft (airplanes, drones, etc.).
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